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Chemical Mechanical Polishing in Silicon Processing
Chemical Mechanical Polishing in Silicon Processing
By: Robert K Willardson, Eicke R Weber (University of California, Berkeley), Robert M Miller, D.V.M., D.V.M., Shin M Hwa Li, Shin Hwa Li
Publisher: Academic Press
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AED1,220
Binding:
Digital (delivered electronically)
Release:
01 Jan 1999
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