Semiconductor Processing and Characterization with Lasers

Lasers are playing an increasingly important role in various fields of semiconductor and device technology. Of special significance is their contribution to the advanced technologies that are needed for economic solutions in photovoltaics. There, lasers are used in processing and characterization of photovoltaic materials, solar cells and module technology.

Table of Contents:
Preface Femtosecond Time-Resolved Microscopy of Laser-Induced Morphology Changes Low Temperature Deposition and Crystallization of Silicon by Means of Laser Techniques Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials Modification of Foreign Atom Concentrations and Profiles in Silicon and Si1-x-y GexCy Alloys by Laser Chemical Etching Properties of Recrystallized Amorphous Silicon Prepared by XeCl Excimer Laser Irradiation Kinetics of Laser-Induced Synthesis and Crystallization of Thin Semiconductors Films Surface Patterning and Thin-Film Formation by Pulsed-Laser Ablation Laser Patterning of CuInSe2/Mo/SLS Structures for the Fabrication of CuInSe2 Sub Modules UV-Excimer Laser Ablation Patterning of II-VI Compound Semiconductors Fabrication and Characterisation of N+ Doped Laser Crystallised Polysilicon Pulsed Laser Ablation: A Method for Deposition and Processing of Semiconductors at an Atomic Level Vacuum Ultraviolet Deposition of Silicon Dielectrics Conditions for Heterophase Junction Formation in Laser Deposited PbTe Films High-Quality Narrow-Gap Thin Films Produced by Quasi-Continuous-Wave IR-Laser-Assisted Evaporation Laser-Induced Etching of Si Surfaces; the Effect of Weak Background Light Gas-Dynamic Effects in Laser Pulse Sputtering of Aluminium Laser Deposited Phthalocyanine- and Fullerene-Based Photovoltaic Cells Synthesis of ß-FeSi2-Films by Pulsed Laser Deposition Complex Semiconductor Compound Targets for Pulsed Laser Deposition Pulsed Laser Deposition and Characterization of CuInSe2 Thin Films for Solar Cell Applications Laser Characterization of Semiconductors Silicon Surface Nonlinear Optics Mapping of Defect-Related Silicon Properties with the ELYMAT Technique in Three Dimensions Laser Examined AlGaAs-Solar Cells with Wide-Gap Tunneling-Thin Cap Layers Use of Photoinduced Microwave Reflection for the Non-Destructive Characterization of Solar Cell Materials and Device Structures Photothermal Deflection Spectroscopy on Amorphous Semiconductor Heterojunctions and Determination of the Interface Defect Densities Summary Abstract: Laser Surface Photovoltage Spectroscopy - A New Tool for Determination of Surface State Distributions and Properties Photorefractive Two Wave Mixing and Steady State Photocarrier Gratings for Semiconductor Characterization A Novel Contactless Approach for Accurate Measurements of Electron-Hole Recombination Lifetime Raman Studies of Doped Poly-Si Thin Films Prepared by Pulsed Excimer Laser Annealing Near Infrared Quasi-Elastic Light Scattering Spectroscopy of Electronic Excitations in III-V Semiconductors Laser Pulsed Induced Microwave Conductivity and Spectroscopic Ellipsometry Characterization of Helium and Hydrogen Plasma Damage of the Crystalline Silicon Surface Laser Diagnostics of InSb Surface Contactless Characterization of Semiconductors Using Laser-Induced Surface Photo-Charge Voltage Measurements Narrowing of Photoluminescence Line from Single Quantum Well under High Excitation Levels Resonance Raman Spectroscopy of Langmuir-Blodgett Films from Metallo-Phthalocyanines Raman and Nonlinear Light Scattering from Undersurface Layers of Ion Implanted Silicon Crystals Raman Study of "Boson Peak" in Amorphous Silicon: Dependence on Hydrogen and Carbon Content Structural Investigation of Microcrystalline Silicon Recombination Lifetime in Silicon from Laser Microwave Photoconductance Decay Measurement Investigation of Electronic Transport in Semiconductor Junctions by Photoinduced Laser Beam Deflection Nondestructive and Contactless Evaluation of Electrical and Thermal Properties of Thin Semiconducting Layers Diagnostics of Semiconductor Surface by Laser-Induced Photovoltage Characterization of the M. O. S. Structure by the Surface Photoelectrical Voltage Method Optical Second-Harmonic Generation (SHG) on Semiconductor Electrodes by Means of Femtosecond and Nanosecond-Pulse Lasers Optical and Electrical Properties of Semiconducting Thin Films Near the Deposition Substrate Crystalline Silicon Materials and Solar Cells The Use of Lasers in the Fabrication of High-Efficiency Silicon Solar Cells A Laser System for Silicon Solar Cell Processing: Design, Setup and Operation Light and Electron Beams Scanning of Solar Cells Characterization of Textured Transparent Conductive Oxides for Thin Film Solar Cell Applications Application of Steady-State Photocarrier Grating Technique for Determination of Ambipolar Diffusion Lengths in Cu (In, Ga) (S, Se)2 - Thin Films for Solar Cells Laser Raman Scattering Characterization of A3B5 Compounds and Photovoltaic Structures Resonant Raman and Photoluminescence of CdTe Films for PV Using Diode Lasers Laser-Aided Measurements of Electric Fields on III-V Semiconductor Structures Using Modulation Spectroscopy: Solar Cell P-N Junctions and [111] Strained Layer Superlattices