Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy: A Laboratory Workbook

During the last four decades remarkable developments have taken place in instrumentation and techniques for characterizing the microstructure and microcomposition of materials. Some of the most important of these instruments involve the use of electron beams because of the wealth of information that can be obtained from the interaction of electron beams with matter. The principal instruments include the scanning electron microscope, electron probe x-ray microanalyzer, and the analytical transmission electron microscope. The training of students to use these instruments and to apply the new techniques that are possible with them is an important function, which. has been carried out by formal classes in universities and colleges and by special summer courses such as the ones offered for the past 19 years at Lehigh University. Laboratory work, which should be an integral part of such courses, is often hindered by the lack of a suitable laboratory workbook. While laboratory workbooks for transmission electron microscopy have-been in existence for many years, the broad range of topics that must be dealt with in scanning electron microscopy and microanalysis has made it difficult for instructors to devise meaningful experiments. The present workbook provides a series of fundamental experiments to aid in "hands-on" learning of the use of the instrumentation and the techniques. It is written by a group of eminently qualified scientists and educators. The importance of hands-on learning cannot be overemphasized.

Table of Contents:
I: Scanning Electron Microscopy and X-Ray Microanalysis.- Laboratory 1 Basic SEM Imaging.- Laboratory 2 Electron Beam Parameters.- Laboratory 3 Image Contrast and Quality.- Laboratory 4 Stereo Microscopy.- Laboratory 5 Energy-Dispersive X-Ray Spectrometry.- Laboratory 6 Energy-Dispersive X-Ray Microanalysis.- Laboratory 7 Wavelength-Dispersive X-Ray Spectrometry and Microanalysis.- II: Advanced Scanning Electron Microscopy.- Laboratory 8 Backscattered Electron Imaging.- Laboratory 9 Scanning Transmission Imaging in the SEM.- Laboratory 10 Low-Voltage SEM.- Laboratory 11 High-Resolution SEM Imaging.- Laboratory 12 SE Signal Components.- Laboratory 13 Electron Channeling Contrast.- Laboratory 14 Magnetic Contrast.- Laboratory 15 Voltage Contrast and EBIC.- Laboratory 16 Environmental SEM.- Laboratory 17 Computer-Aided Imaging.- III: Advanced X-Ray Microanalysis.- Laboratory 18 Quantitative Wavelength-Dispersive X-Ray Microanalysis.- Laboratory 19 Quantitative Energy-Dispersive X-Ray Microanalysis.- Laboratory 20 Light Element Microanalysis.- Laboratory 21 Trace Element Microanalysis.- Laboratory 22 Particle and Rough Surface Microanalysis.- Laboratory 23 X-Ray Images.- IV: Analytical Electron Microscopy.- Laboratory 24 Scanning Transmission Imaging in the AEM.- Laboratory 25 X-Ray Microanalysis in the AEM.- Laboratory 26 Electron Energy Loss Spectrometry.- Laboratory 27 Convergent Beam Electron Diffraction.- V: Guide to Specimen Preparation.- Laboratory 28 Bulk Specimens for SEM and X-Ray Microanalysis.- Laboratory 29 Thin Specimens for TEM and AEM.- Laboratory 30 Coating Methods.- Solutions to Laboratory Exercises.- Laboratory 2 Electron Beam Parameters.- Laboratory 3 Image Contrast and Quality.- Laboratory 4 Stereo Microscopy.- Laboratory 5 Energy-Dispersive X-Ray Spectrometry.- Laboratory 6 Energy-Dispersive X-Ray Microanalysis.- Laboratory 7 Wavelength-Dispersive X-Ray Spectrometry and Microanalysis.- Laboratory 8 Backscattered Electron Imaging.- Laboratory 9 Scanning Transmission Imaging in the SEM.- Laboratory10 Low-Voltage SEM.- Laboratory 11 High-Resolution SEM Imaging.- Laboratory 12 SE Signal Components.- Laboratory 13 Electron Channeling Contrast.- Laboratory 14 Magnetic Contrast.- Laboratory 15 Voltage Contrast and EBIC.- Laboratory 16 Environmental SEM.- Laboratory 17 Computer-Aided Imaging.- Laboratory 18 Quantitative Wavelength-Dispersive X-Ray Microanalysis.- Laboratory 19 Quantitative Energy-Dispersive X-Ray Microanalysis.- Laboratory 20 Light Element Microanalysis.- Laboratory 21 Trace Element Microanalysis.- Laboratory 22 Particle and Rough Surface Microanalysis.- Laboratory 23 X-Ray Images.- Laboratory 24 Scanning Transmission Imaging in the AEM.- Laboratory 25 X-Ray Microanalysis in the AEM.- Laboratory 26 Electron Energy Loss Spectrometry.- Laboratory 27 Convergent Beam Electron Diffraction.