MEMS/NEMS Nano Technology

Volume is indexed by Thomson Reuters CPCI-S (WoS). This book brings together over 153 peer-reviewed papers, grouped into 6 chapters: Micro-/Nano-Fabrication and Measurement Technologies, Micro-Sensors and Actuators, Microfluidic Devices and Systems, MEMS/NENS and Applications, Nano-Material Research / Nanotubes / Nanowire Devices, Micropower Technology, Theories in Micro-/Nano-Technologies. Most of the papers are authored by Chinese researchers, and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China. The work will be of great interest to researchers, graduate students and engineers who are working in the fields of MEMS and nano-technology.

Table of Contents:
Preface CHAPTER 1: Micro/Nano Fabrication & Measurement Technologies Application of Ultrasonic Stress Relief in the Fabrication of SU-8 Micro Structure Design and Empirical Study for Coner Compensation in 25% Wt TMAH Etching on (100) Silicon Wafers Characterization of AlGaN/GaN Cantilevers Fabricated with Deep-Release Techniques Dynamic Characteristics Measurement of Silicon Micro-Cantilever in Low Temperature Environment Low Cost Fabrication of Micro Glass Cavities For MEMS Wafer Level and Hermetic Packaging Study of Under Etching Characters of Si (100) in Surfactant Added TMAH Design and System-Level Simulation of a Novel On-Chip Test Based on Macromodels An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope Fabrication of Large Area, 70 nm Pitch Nanograting Patterns by Nanoimprint Lithography Using Flexible Polymer Stamp Effect of Micro-Injection Molding Process Parameters for Various Micro-Channels Fabrication and Testing of SOG Structure Flat Heat Pipes with Triangle Grooves Application of KOH Anisotropic Etching in the Fabrication of MEMS Devices Fabrication of Nano-Grating by Focused Ion Beam / Scanning Electron Microscopy Dual-Beam System A Monolithic MEMS Accelerometer Process Fabrication and Performance Simulation of Microscale Thermoelectric Modules Made with Bi2Te3-Based Alloys Investigation on Silicon-Glass Electrostatic Bonding Time Experiment Low-Cost Fabrication Strategies of Microfluidic Device on Glass Substrate Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching CHAPTER 2: Micro Sensors and Actuators A Capacitor-Free CMOS Low-Noise, Low-Dropout Regulator for Capacitive Micro-Machined Accelerometer Application 3D Pyramidal Micropool Array Electrode for Amperometric Microsensor Design and Implementation of SOI Based Capacitive Microaccelerometers Without Notching Effects Fabrication and Characterisation of Polysilicon-Based Clamped-Clamped Filter Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever Structure Design and Experiment for a Resonant Accelerometer based on Electrostatic Stiffness Two-Dimensional Motor Based on Surface Acoustic Wave A Triple Channel High Rejection RF MEMS Switched Filter Bank A Micro Spatial Light Modulator Based on Leverage Principle Design, Development and Testing of Quartz Tuning Fork Temperature Sensor A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass Design and Fabrication of a Piezoelectric Sensor for Weighing in Motion Simulation and Design on Structure for Experimental Verification of Dielectric Charging of Millimeter-Wave MEMS Switches A Miniature Fluxgate Sensor with CMOS Interface Circuitry A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames The Design of AlGaN/GaN HEFT-Micro-Accelerometer and Temperature- Dependence Electrical Performance Temperature Characteristic of Platinum Piezoresistive Pressure Sensor Design and Simulation of Electromagnetic Two-Dimensional MOEMS Scanning Mirror Micro Magnetic Field Sensor Based On Terfenol-D/PZT/Terfenol-D Magnetoelectric Composites Design of the Resonance Tracking System for a Resonant Accelerometer Based on Electrostatic Stiffness Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology The Study of a Fluxgate SPICE Model Based on Schmitt Trigger System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer Technique for Compensation of Temperature Drift in Thermal Excited Si-Based Resonant Pressure Sensor On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope Experimentally Study of the Cushion Materials for Micro Accelerometer under Shock Load Design and Fabrication of Micro Oxygen Sensor Nanostructures and Nanodevices Special Fabrication and Characterization CHAPTER 3: Microfluidic Devices and Systems Electrohydrodynamic Printing of Conductive Patterns on Glass Slides Improve Blood Clotting Feature of Silicon Microneedle by Silver Coating Design of the Cascaded Open-Channel Direct Current Electroosmotic Pump On-Chip Bio-Micro Separation and Operation Effected on the Diamagnetic Levitation with MEMS Numerical Simulation of Dielectrophoresis Induced Electrothermal Fluid Flow Research of Separation of Amino Acids on Micro-Free Flow Electrophoresis Chip with Voltage Applied in Two-Dimension The Fabrication of Ag Nanostructure Array Integrated with Microfluidics for Surface Enhanced Raman Scattering Stokes' Second Problem with Velocity Slip Boundary Condition An Experimental Study on the Side-Opening Filling Process at the Interface between Microchannels with Different Widths A Porous Microfluidic Chip for Protein Extraction Based on Solid Phase Extraction Method Characters of Particles in Copper-Water Nanofluids Made by Novel One-Step Aqueous Reduction Numerical Simulation of Electromagnetic Actuator for Impedance Pumping Study on Ultrasonic Fusion Bonding for Polymer Microfluidic Chips Study of the Microfluidic-Immunoassay Chip used to Capture Cancer Cells Simulation and Experimental Study of a Porous Electroosmotic Pump Experimental Investigations of Anode Structure on the Performance of Air-Breathing µDMFC The Competition of the Retraction and Capillary Forces during the DNA Molecules Moving within Channels Development of a Novel Electrochemical Surface Plasmon Resonance Instrument Based on a Mini Three Electrode Flow Cell The Fabrication and Experiment of a Four-Electrode Conductivity Sensor for Fresh Water Fabrication of PDMS Microchannels with Round Profiles Using Glycerol Molds Theoretical Analysis and Experimental Investigation on Designing Method of Micro-Groove Heat Pipe Magnetic Microfluidic Mixer Rapid Microfluidc Biochips Fabrication by Femtosecond Laser on Glass Substrate Rapid Detection of Methanol in an Integration Microfluidic Chip A Tire Pressure Monitoring System Based on MEMS Sensor A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever CHAPTER 4: MEMS/NENS and Applications Development of the 400MHz Power Durable SAW Filter A Research on Implantable Microelectrodes for EMG Signal Acquisition A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer Design and Test of a Self-Oscillating Driving ASIC for a Low-Q Gyroscope Based on PI Controller Design and Development of the Shrapnel-Borne Meteorological Exploration System Based on MEMS Research of Curved Artificial Compound Eyes Based on MEMS Technology Macro Machined Photoacoustic Non-Resonant Cell Research of the Hadamard Multiplex Advantages Using a Programmable Micro-Mirror in a Near-Infrared Spectrometer A High-Performance Fourth-Order Sigma-Delta Micromachined Accelerometer A Micro-Optical Transceiver for Interferometric Fiber Optic Gyroscope Polarization-Noise in Integrated Optical Gyro A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors Silicon-Based Microneedle Array Electrodes for Biopotential Measurement A Miniaturized Spectrometer Based on Optical Modulator Composed of Grating and Tunable Fabry-Perot Novel Triplexer Chip Design Combination of an Asymmetric Y Branch Waveguide and a Multimode Interference Lateral RF MEMS Switch Based on Surface Micromachining Process An AD7746-Based Data Acquisition System for Capacitive Pressure Sensor in Weather Detection Application Design and Test of MEMS Attitude Measurement Unit for Fall Detection A High-Performance Interface ASIC for Quartz Rate Sensor New Style Four-Electrode MEMS Conductivity Chip A Curvature-Compensated, High Power Supply Rejection CMOS Bandgap Reference for MEMS Micro-Accelerometer A Four-Quadrant Analog Multiplier Based on CMOS Source Coupled Pair Designing Experiment Platform for Micro Heat Exchangers Realization of Hadamard Transform Encoding Mask Using Programmable Digital Micro-Mirror Device Study of a Capacitive Clamped Beam RF MEMS Power Sensor Based on MEMS Technology Design of High-SNR CMOS Interface Circuit for Micro-Machined Gyroscope Nano-Piezoelectric Ceramics Power Supply Based on Single Electron Storage CHAPTER 5: Nano Material Research/Nanotube/Nanowire Devices MEMS Assisted Fabrication of Cr Nanobowls Effect of Temperature on Elasticity of Silicon Nanowires Design, Fabrication and Characterization of in-Plane Titanium Microneedles for Transdermal Drug Delivery Characterization of Contact and Bulk Piezoresistive Properties of Carbon Nanotube/Styrene-Butadiene-Styrene Composite Design of MMFCS for MAV Based on MEMS Sensor Improvement on Mechanical and Piezoresistivity Properties of Cementitious Binder by Using Surface Oxidized Multi-Wall Carbon Nanotubes Biocompatibility Study of Mn0.5Zn0.5Fe2O4 Magnetic Nanoparticles Fabrication and Characterization of Cobalt Nanostructure-Based Microelectrodes for Phosphate Detection Fabrication of Silicon Nano-wire by Oxidation DFT Study of Structure, Electronic, Optical and Magnetic Properties of ZnO and Cu-Doped ZnO Clusters Theoretic Study of the Structures and Electric Properties of N-Doped InSb Nanoclusters Effect of Compressive Strain on Electrical Resistivity of Carbon Nanotube Cement-Based Composites Effect of Wet Etching Parameter on the Diameter and Length of Silicon Nanowires Adhesive Enhancement Improved Field Emission Characteristics of Carbon Nanotube Arrays on Energetic Ion Pre-Bombarded Si Substrates Electrodeposition of Copper Nano-Clusters at a Platinum Microelectrode for Nitrate Determination CHAPTER 6: Micropower Technology Design and Research of Flat Micro Heat Pipe with Glass Fiber Wick Fabrication and Performance of Piezoelectric MEMS Generators Using Bulk PZT Films Design, Simulation and Fabrication of an Air-Driven Microturbomachine Design and Fabrication of a Polymer-Based Micro Direct Methanol Fuel Cell A Novel Assembly Method for a Micro Direct Methanol Fuel Cell Using Multi-Layer Bonding Technique A Broadband Frequency Piezoelectric Vibration Energy Harvester Fabrication of Piezoelectric Vibration Power Harvester using Bulk PZT Study on the Performance of Gas Journal Bearings for Power MEMS CHAPTER 7: Theories in Micro-Nano Technologies Analysis and Research of Piezoelectric Dynamic Weighing Sensor Multidisciplinary Design Optimization of the 2-D Microaccelerometer Assessing the Validity of Quantum Corrections to Molecular Dynamics Simulations of Bulk Silicon Molecular Dynamics Study of Water Structure Confined in Vibrative Silicon Plates Molecular Dynamic Simulations of Contact Thermal Resistance between Two Individual Silicon Nanowires Micro-Stress Assembly of Fragile Miniature Parts Design and Simulation of a Differential and Decoupled Micromachined Gyroscope Analytical Solution of Mixed Electroosmotic and Pressure-Driven Flow in Rectangular Microchannels Rapidly Identify the Critical Parameter of MEMS Device Based on Element Model Library Electrical Characteristics of a Stimulating Microelectrode-Electrolyte Interface Analysis of Capillary Condensation of Vapor in Multi-Wall Carbon Nanotubes Parametric Research on Micro-Zigzag Slot Mechanism in OICW Performance Analysis of a Novel MEMS Terminational Latch Mechanism Effects of Phosphorus-Doping on the Microstructures, Optical and Electric Properties in N-Type Si:H Thin Films Stability Analysis in High-Order Electromechanical Sigma-Delta Accelerometer Experimental Research on Lift up and Drag Reduction Effect of Streamwise Travelling Wave Wall Optimization Based on ANSYS Electric Numerical Method for a Novel MEMS ESI-MS Ion Focusing Device Tribological Properties of Magnesium Silicate Powders Prepared by Ball Milling TCR of the Ni-Cr Thin Film Resistors Used in Piezoresistive Pressure Sensor Failure Mechanisms and Lifetime Simulation Method for Nano Scale CMOS Device Threshold Values Analysis of Substrate Parameters Based on MEMS Microstrip Filter Thermal Transport through Solid-Solid Interface with an Interlayer Dielectric Constant Measurement of Liquids Using Nanosecond-Pulsed Signals Optical Properties of Silicon Quantum Dots Generation and Application of the Atmospheric Pressure DC Glow Discharge Using Minor Electrodes under N2 Flow Patterns of Skylight Polarization at Different Atmospheric Conditions The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor A Novel Noise Elimination Method for MEMS Sensor Nonlinear Ultrasonic Techniques for Testing Micro-Defects in Metal Matrix Composite Structure Piezoresistive Sensitivity and Al Ohmic Contact of Highly Doped Polycrystalline Silicon Nano Thin Films