Fundamentals of Microfabrication

Nanotechnology and microengineering are among the top priority research areas in the United States and will continue to be so during the next decade, making Fundamentals of Microfabrication an important and timely work. Written by an internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication, this book will function as both a valuable textbook and a handy reference. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.

Table of Contents:
Lithography Introduction Historical Note: Lithography's Origins Photolithography Alternative Lithographies Emerging Lithography Technologies Pattern Transfer with Dry Etching Techniques Introduction Dry Etching: Definitions and Jargon Plasmas or Discharges Physical Etching: Ion Etching or Sputtering and Ion Beam Milling Dry Chemical Etching Physical-Chemical Etching Comparing Wet and Dry Etching Dry Etching Micromachining Examples Pattern Transfer with Additive Techniques Introduction Growth Physical Vapor Deposition Chemical Vapor Deposition Epitaxy Recent Trends in Vacuum Equipment Electrochemical Deposition Silk Screening or Screen Printing Comparison of Thin versus Thick Film Deposition Deposition Methods of Organic Layers Planarization Plasma Spraying Selection Criteria for Deposition Method Doping Pattern Transfer with Additive Techniques Examples Wet Bulk Micromachining Introduction Historical Note Si-Crystallography Si as a Substrate and Structural Material Wet Isotropic and Anisotropic Etching Etching with Bias and/or Illumination of the Semiconductor Etch-Stop Techniques Problems with Wet Bulk Micromachining Wet Bulk Micromachining Examples Surface Micromachining Introduction Historical Note Mechanical Properties of Thin Films Surface Micromachining Processes Poly-Si Surface Micromachining Modifications Non Poly-Si Surface Micromachining Modifications Materials Case Studies Poly-Silicon Surface Micromachining Examples LIGA Introduction LIGA Processes - Introduction to the Technology LIGA Applications Technological Barriers and Competing Technologies Comparison of Micromachining Techniques Introduction and Terminology Historical Note Machining Tools Comparison of Micromachining Techniques Micromachining: What's Next? Nanomachinery by Molecular Engineering and Nanofabrication Micromachine Development and Packaging Introduction Micromachine Development Design Software Packaging Scaling Laws, Actuators, and Power in Miniaturization Introduction Microintuition Scaling in Electrostatics and Electromagnetics Scaling in Fluidics Scaling in Optics Scaling in Chemistry and Electrochemistry Thermal Actuators Other Actuators Integrated Power Microfabrication Applications Introduction Definitions and Classification Methods Overall Market for Micromachines Automotive Sensor Needs Micromachining in Chemical Sensors and Instrumentation for Biomedical Applications Gas Sensors Miniaturization of Analytical Equipment Index