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Home > Mathematics and Science Textbooks > Science: general issues > Method and system for the removal and/or avoidance of contamination in charged particle beam systems: United States Patent 9981293
Method and system for the removal and/or avoidance of contamination in charged particle beam systems: United States Patent 9981293

Method and system for the removal and/or avoidance of contamination in charged particle beam systems: United States Patent 9981293


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About the Book

A charged particle beam system is disclosed, comprising: a charged particle beam generator for generating a beam of charged particles; a charged particle optical column arranged in a vacuum chamber, wherein the charged particle optical column is arranged for projecting the beam of charged particles onto a target, and wherein the charged particle optical column comprises a charged particle optical element for influencing the beam of charged particles; a source for providing a cleaning agent; a conduit connected to the source and arranged for introducing the cleaning agent towards the charged particle optical element; wherein the charged particle optical element comprises: a charged particle transmitting aperture for transmitting and/or influencing the beam of charged particles, and at least one vent hole for providing a flow path between a first side and a second side of the charged particle optical element, wherein the vent hole has a cross section which is larger than a cross section of the charged particle transmitting aperture. Further, a method for preventing or removing contamination in the charged particle transmitting apertures is disclosed, comprising the step of introducing the cleaning agent while the beam generator is active.


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Product Details
  • ISBN-13: 9798589229233
  • Publisher: Independently Published
  • Publisher Imprint: Independently Published
  • Height: 280 mm
  • No of Pages: 28
  • Sub Title: United States Patent 9981293
  • Width: 216 mm
  • ISBN-10: 8589229238
  • Publisher Date: 03 Jan 2021
  • Binding: Paperback
  • Language: English
  • Spine Width: 2 mm
  • Weight: 91 gr


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Method and system for the removal and/or avoidance of contamination in charged particle beam systems: United States Patent 9981293
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Method and system for the removal and/or avoidance of contamination in charged particle beam systems: United States Patent 9981293
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Method and system for the removal and/or avoidance of contamination in charged particle beam systems: United States Patent 9981293

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