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Advanced Ceramic Oxides for Electronics.: (1 Schriftenreihe Kompetenzen in Keramik)

Advanced Ceramic Oxides for Electronics.: (1 Schriftenreihe Kompetenzen in Keramik)


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About the Book

Advanced ceramic oxides play a dominant role in electronics as functional films with dielectric, piezoelectric, ferroelectric or superconducting properties. For integration of these films into passive or active devices different technologies such as electrochemical and thermal formation or CVD and PVD (chemical or physical vapour deposition) are established. In this treatise the effect of fabrication technology on the film properties is studied with focus on electrochemical formation. As one important example for electrochemical dielectric film formation, Ta-capacitor manufacturing is discussed. It is shown that anodic valve metal oxide films are promising as "high k" materials for active devices such as DRAM storage capacitors or MOSFET gate oxides as well. For characterization of oxide films at high lateral resolution, the new method of SAME (spectroscopic anisotropy micro-ellipsometry) is introduced.

Table of Contents:
Valve metal- and ceramic oxides in electronics Experimental approaches Fundamentals Electrochemical oxide layer formation on valve metals The C(U) behavior of valve metal electrodes Applications of lasers in electrochemistry Electrochemical photocurrent measurements The valve metal systems The Ti/TiO2 system The Zr/ZrO2 and Hf/HfO2 systems Zr/ZrO2 Hf/HfO2 The Nb/Nb2O5, Ta/Ta2O5 and Al/Al2O3 systems Nb/Nb2O5 Al/Al2O3 Ta/Ta2O5 Application of valve metal oxide in capacitor manufacturing Capacitor fundamentals Capacitor device types and production of Ta-capacitors Current research trends for Ta-capacitors Effect of oxygen and sintering on dislocation formation Thermal runaway The Si/SiO2 system Si/SiO2 in MOSFETs Si/SiO2 in DRAMs The DRAM storage capacitor (deep trench DT) Aspect ratio increase of DT Si etch Bottle shaped DT Hemispherical Silicon grain (HSG) formation Alternative dielectrics Vertical transistor devices Advanced electroceramic systems; ferroelectrics, high TC superconductors Ferroelectrics High TC superconductors, YBCO Experimental details for YBCO measurements Results for the YBCO system Spectroscopic ellipsometry in electronics, Fundamentals of conventional spectroscopic ellipsometry Fundamentals of Spectroscopic Anisotropy Micro-Ellipsometry SAME Application of SAME in electronics SAME for thin film growth control Form birefringence; SAME for structure analysis Stress birefringence; SAME for film stress analysis


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Product Details
  • ISBN-13: 9783816772163
  • Publisher: Fraunhofer IRB Verlag
  • Publisher Imprint: Fraunhofer Irb Verlag
  • Height: 210 mm
  • No of Pages: 157
  • Width: 148 mm
  • ISBN-10: 3816772161
  • Publisher Date: 27 Oct 2006
  • Binding: Paperback
  • Language: English
  • Series Title: 1 Schriftenreihe Kompetenzen in Keramik


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