Reliability of MEMS
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Reliability of MEMS: Testing of Materials and Devices

Reliability of MEMS: Testing of Materials and Devices


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About the Book

This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

Table of Contents:
Evaluation of Mechanical Properties of MEMS Materials and Their Standardization Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating-Substrate Systems Thin film Characterization Using the Bulge Test Uniaxial Tensile Test for MEMS Materials On-chip Testing of MEMS Reliability of a Capacitive Pressure Sensor Inertial Sensors High-Accuracy, High-Reliability MEMS Accelerometer Reliability of MEMS Variable Optical Attenuator Reliability of MEMS Variable Optical Attenuator (pages 239-266) Eco Scan MEMS Resonant Mirror

About the Author :
Osamu Tabata is Professor in the Department of Microengineering at Kyoto University. He received his MSc and PhD degrees from Nagoya Institute of Technology. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. He joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, in 1996, and the Department of Mechanical Engineering at Kyoto University in 2003. Osamu Tabata is engaged in the research of micro/nano processes, MEMS and micro/nano system synthetic engineering. He received numerous awards, including the Science News Award and the Research & Development Top 100 Award in 1993 and 1998. Toshiyuki Tsuchiya is Assistant Professor in the Department of Microengineering at Kyoto University. He received his PhD from Nagoya University, Japan, in 2002. From 1993 to 2004, he carried out industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. In 2004, he joined the Department of Mechanical Engineering of Kyoto University. Toshiyuki Tsuchiya's current research is focused on mechanical properties evaluation of micro/nano materials and MEMS and micro/nano system synthetic engineering.

Review :
"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies." Advanced Materials "... an excellent book that gives a good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices..." MRS Bulletin


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Product Details
  • ISBN-13: 9783527675036
  • Publisher: John Wiley and Sons Ltd
  • Publisher Imprint: Wiley-VCH Verlag GmbH
  • Language: English
  • Sub Title: Testing of Materials and Devices
  • ISBN-10: 3527675035
  • Publisher Date: 26 Mar 2013
  • Binding: Digital (delivered electronically)
  • No of Pages: 324


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