Micro-Nano Technology XVI: (Volumes 645-646 Key Engineering Materials)

Collection of selected, peer reviewed papers from the 16th Annual Conference and 5th International Conference of the Chinese Society of Micro-Nano Technology (CSMNT 2014), August 31-September 3, 2014, Chengdu, China. The 226 papers are grouped as follows: Chapter 1: Materials and Technologies in the Scale of Micro and Nano; Chapter 2: Micro/Nanofluids Research and Technologies; Chapter 3: Measurements, Sensors and MEMS; Chapter 4: Micro Actuators and Devices; Chapter 5: Optics in the Scale of Micro and Nano; Chapter 6: Energy Harvesting, Power Supply and Technologies for Fuel Cells; Chapter 7: Bioresearch and Biomedical Engineering

Table of Contents:
Preface Chapter 1: Materials and Technologies in the Scale of Micro and Nano Study of PSG Thickness Uniformity Influencing Factors in LPCVD Anisotropic Elastic Properties of Chiral Sculptured Thin Films at Micro-Scale Evaluated by Resonance Frequency Spectra The Dilute Magnetic Properties of Monolayer MoS2 Doped with Transition Metal Fe and VA Atoms Strategies for Defect-Free and Deep Wet Etching of Pyrex 7740 Effect of Hydrophilic and Hydrophobic SiO2 Particles on Performances of PI/Al2O3 Composite Films Synthesis and Characterization of Topological Insulator Bi2Te3 Nanowires Electronic and Magnetic Properties of Rare-Earth Atoms Absorbed on Graphene Sheet: A Theoretical Study Melt Electrohydrodynamic Direct-Writing Micro/Nano Fiber with Restriction of Heated Sheath Gas Experimental Study on WEDM Machining of PCD and PCBN Compacts Wet Anisotropic Etching Characteristics of Si{100} in TMAH+Triton at near the Boiling Point Hierarchically Ordered Porous Carbon as a Host Material for Energetic Composites TCAD Study of the Raised SiGe Source/Drain in 40nm PMOS Adsorption of Silver Nanoparticles on Modified Surfaces W-Band Quadrupler Based on Multi-Chip Module and Schottky Barrier Diodes Intermediate Layer Bonding for Silicon and Piezoelectric on UV Adhesive Quantitative Production of Charges with a Carbon Nanotubes Coated Electrode Based on Trichel Pulses Band Engineering of Graphene Nanomesh Field Effect Transistor under Multiscale Simulation Framework Growth and Magnetic Properties of Three-Dimensional Firtree-Like Cobalt Microcrystals with Hierarchical Dendritic Superstructures The Thermal Decomposition Behavior of Graphene Oxide/HMX Composites Facile Fabrication of Super-Hydrophobic Surfaces by Spray PTFE Frequency Characteristics Research for the Negative Resistance Oscillations Phenomenon of a Silicon Magnetic Sensitivity Transistor Large-Scale Synthesis and Microwave Absorption Properties of CoFe2O4/ Co0.4Zn0.6Fe2O4 Hollow Nanospheres Research of Magnetic Characteristics of the Split-Drain MAGFET Based on Nano-Polysilicon TFTs Graphene Field Effect Transistor’s Circuit Modeling and Radio Frequency Application Study Synthesis and Dispersity of YBCO Powder Produced by Oxalic Acid Precipitation Method Influence of Defects on the Young's Modulus of [110] Silicon Nanowires with Different Cross Sections Sintering Behavior and Electrical Property of Surface Treated Silver Nanoparticle for Electronic Application Study on the Etching Technique of Non-Photosensitive Polyimide An Investigation on Resistive Switching Characteristics Induced by HfOx and Electrode Interfaces Study on Internal Stress in Micro-Electroformed Layer Low Temperature Eutectic Alloy Bonding Used in MEMS-Based Solid Propellant Microthrusters Array Simulation and Test of through Silicon Vias Impacted by Large Current Pulse Preparation of Strongly Hydrophobic Film with Large Area and Flexibility Based on Micro Fabrication Preparation of TiO2 Nano-Film by Anodic Oxidation Method and its Hydrophobic Modification Fabrication and Thermal Performance of Copper Pillars Modified Micro Heat Pipe (MHP) Research on TSV Dry Etching Technology Research on Microstructure and Wear Resistance of Cast-Penetrated Layer Strengthened by Nano-Sized TiN Intermediate Alloy Research on Delamination of Plastic Packaging Device during Reflow Soldering Preparation of Nano α-Fe2O3 Powders and Characterization of their Photo-Catalysis Capacities Research on the Preparation of Nanoporous Copper Using Taguchi Method Preparation of Mn-Zn Ferrite Flake Absorbent by Self-Reactive Spray Forming Technology Intermolecular-Interaction and Mechanical Properties of MNs-Plasticizer Modified 2,4,6-Trinitrotoluene/1,3,5-Trinitrohexahydro-1,3,5-Triazine Molten-Energetic-Composite(MEC) Research Survey of Electroformed Nickel Material Properties Used in MEMS The Effect of Thermal Accumulation to the Field Emission Properties of the Carbon Nanotubes Effect of Ammonia as an Inert Solvent on Structure and Separation Performance for Oil/Water Mixtures of PVDF Porous Membranes Size Effect of Piezoelectricity in ZnO Nanowires: A First-Principles Study Ejection and Motion Behaviors Simulation for Multi-Jet Electrospinning Measurement on the Mechanical Properties of SiC Thin Films Based on Square Thin Films Theory Optimization of Chemical Mechanical Planarization Process of High Enrichment Slurry Under Low Pressure Effect of Reaction Inhibitors on Synthesized Silver Nanostructures via Solvothermal Method Effects of NaOH Concentration on Section Structures of Oxide Films Based on TC4 by Anodic Oxidation Process A Novel High Precision Analytic Potential Function for Diatomic Molecules The Simulation and Analysis of Current Crowding and Joule Heat in Flip Chip Solder Bumps Effects of n-Type Dopants on Electronic Properties in 4H-SiC Fabrication of Ultrasmooth Polymer Films by Concentration Control and Spin Speed Adjustment Nanopore in C-S-H Gel Stability Analysis of Hardened Cement Pastes Simulation and Typical Application of Multi-Step Diffusion Method for MEMS Device Layers Synthesis of Nano-Al with Fe2O3 Nanowires to Realize Core-Shell Composite Materials Arrays Based on Colloidal Templates Evaluation of the Stability on the New Alkaline Copper Bulk Slurry Research on Low Temperature Anodic Bonding Based on Interface Pretreatment of Dielectric Barrier Discharge Plasma The Study on the Selectivity Ratio of SiC/Epoxy Resin Based on ICP Etching High-Efficiency Preparation of N-Doped Titania with High Visible Light Photocatalytic Activity Using Composite N Precursor UV Photocatalytic Digestion Utilizing TiO2 Nano-Fiber for the Determination of Total Phosphorus Research of Thin Film for Laser Polarization Beam Splitter Micro Laser Joining between Dissimilar Materials of 200μm Thick TiNi Alloy and Stainless Steel and the Joint’s Electrochemical Behavior Electrokinetic Research on the Dispersion Behavior of Nano-Ceria Particles in Concentrated Suspensions Study of SiC’s Mechanical Property Variance Caused by Film Thickness Experimental Study on the Relationship between Dislocation Density and Internal Stress in Micro Electroforming Layer Influence of Hybrid Fibers on Flexural Properties of Ultra High Toughness Cementitous Composites with Nano-SiO2 The Influence of Polyhedral Oligomeric Silsesquioxane on Heat Resistance and Curing Kinetics of Potting Materials Study on Mechanism of Phase Forming in Ni+ Implantation into Ti6Al4V at Elevated Temperature Preparation and Mechanical Properties of Ultra-Fine Grain Medium-Carbon Steel Based on Equal-Channel Angular Pressing Chapter 2: Micro/Nanofluids Research and Technologies Tribological Properities of Oil-Based ZnO Nanofluids Performance Investigation of TiO2 Nanofluid Coolant for Automobile Cooling Applications The Simulation and Experimental Analysis of Hydrodynamic Focusing Effect inside a Rectangular Microchannel Threshold Model of Micro-Fluidic Inertial Switch Based on Orthogonal Regression Design Effect of Flow Rate of Slurry in Micro-Channels on the Consistency of Polishing Rate Discrimination of Low-Grade Oil from Edible Oil by a Microfluidic Device Effect of Elliptical Dimples on Hydrodynamic Lubrication Chapter 3: Measurements, Sensors and MEMS Study of Bandwidth Expansion Based on Electrochemical Vibration Sensor A Novel Micro-Machined Out-of-Plane Resonant Accelerometer with Differential Structure of Different-Height Resonant Beams The Research of Turn-On Time for Silicon Micromechanical Gyroscope on a Chip 3D Indoor Positioning System Based on MEMS Sensors Analysis Temperature Characteristics of Atmosphere Pressure Sensor Caused by Residual Gas Q-Factor Improving of Film Bulk Acoustic Wave Resonator for Chip-Scale Atomic Clocks Study on a Planar Interdigitated MEMS Supercapacitor Using Modeling and Simulation Method Passive Acoustic Localization Based on MEMS Microphone Arrays An Electromagnetic Vibrating Ring Gyroscope Using SOI-MEMS Technology The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110 The Influence of Die-Attach Adhesives on the Packaging of MEMS Accelerometer High Resolution Micro-Displacement Sensing Circuit for Rotor Micro-Gyroscope Simulation and Experimental Verification of Silicon Microgyroscope's Closed-Loop Driving Circuits Based on Cadence Design of 16 bit 200kHz Feedforward Sigma-Delta ADC Applied in Silicon Gyroscope Advancements in Micro-Structure with Multiple Stress Concentration Region for Bionic Vector Hydrophone High-Precision Quadrature Signal Generator for Digital Demodulation of MEMS Gyroscope Study of Thin Film Pressure Sensor by Magnetron Sputtering FPGA-Based Test Equipment for System-Level MEMS Switch Series Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8 Passive Wireless Multi-Parameter Sensor System for Hermetic Environment Monitoring Statistical Analysis and Yield Enhancement of MEMS Devices by Considering Multi-Process Variations Effects of Hall Output Probes Shape on Magnetic Characterization of Hall Magnetic Field Sensor Based on MOSFET Chip-Level Active Temperature Control for Improving Temperature Robust of a Micro-Gyroscope A 16 Bits 500 kHz Sigma-Delta DAC for Silicon Micro Gyroscope An Integrated Pressure and Magnetic Field Sensor Based on Piezoresistance Effect The SOI Micro-Accelerometer Fabricated by Sacrificial Process Noise Analysis of Silicon Microgyroscope's Transimpedance Amplifier Interface Circuit Micromachined Tri-Axis Capacitive Accelerometer Based on the Single Mass Multi-Chip Module Design of a MEMS Air Pressure Sensor A Modulated Feedback Approach to Improve Closed Loop MEMS Accelerometer Bias Instability A Second Differential Bandpass Filter with Tuning Center Frequency and Constant Q Trajectory Guidance Law for MAV Based on MEMS Sensor/GPS A Feed-Forward Sigma-Delta Modulator Applied in Silicon Gyroscope A Novel Capacitive Temperature Sensor for Real-Time Monitoring of Temperature in the Silicone Oil Fan Clutch Active Disturbance Rejection Control Design for Fast AFM Plastic Strain Effect in Progressive Multi-Cycle Nano-Indentation Measurement Micro-Fabricated Pre-Concentrator Filled with Single-Walled Carbon Nanotubes as Adsorbent Material Research on Rapid Detection and Accounting of Small Particles in Marine Hydraulic Oil Dissemination of Micro-Gram Weights from 500 μg to 50μg Based on Automatic Mass Measuring System Design and Fabrication of High Vacuum Gauge Based on Micro Hotplate Analysis of Impact of Bottom Electrode Position on Dynamic Pull-In Parameters of Microcantilevers Fabrication and Formaldehyde-Sensing Property of Quartz Crystal Microbalance (QCM) Coated with PVP-MWCNTs Composites A Micro Direct Formic Acid Fuel Cell with PDMS Fluid Flow Plates A Novel Microfluidic Time Gate for Controlling Flow of Liquids Microfluidic Amperometric Detection Sensor with Integrated Ag/AgCl Reference Electrode Optimization of Microfluidic Chip Bonding Technology Based on Polydimethylsiloxane Applied Research on Self-Sensing Micro-Flow Injection Device Based on Piezoelectric Ceramics Iron Wear Particle Content Measurements in Process Liquids Using Micro Channel – Inductive Method Fluid Dynamic Analysis on Solar Heating Error of Radiosonde MEMS Humidity Measurement Experimental Study on Velocity of Flyer Based on Silicon A New Method of Design and Verification of Digital Silicon Gyroscopes Closed-Loop Driving System Based on MicroBlaze Design and Fabrication of a SOI Optical Waveguide Sensing Platform for Biochemical Sensor Application The Research on Electroplating Technology Used for RF Micro Inductor Coil Study on Magnetization and Detection the Metal Particle in Harmonic Magnetic Field The Buckling Simulation of Planar W-Form Micro-Spring in MEMS Safety and Arming Device Design‚ Optimization and Simulation of an Electric Field Microsensor Based on PZT Piezoelectric Interdigitated Cantilevers Design and Application of Digitally-Programmable Delay-Time Microchip in Detonating System A Traceable Metrological Method with Nanometer Scale Resolution for Micro-Structure Accurate and Traceable Calibration of the Stiffness of Various AFM Cantilevers Design of Minimal Capacitance Detect Circuit for MEMS Capacitive Sensor Micro-Spring’s Variable Stiffness Design and Characteristics Analysis Fabrication Process and Electro-Thermal Modeling for the Cathode of the CMOS-Compatible Hot-Filament Vacuum Gauge A New Design of a Piezoelectric Triaxial Micro-Accelerometer UVC-Thermal Coupled Digestion without Oxidant for the Detection of Total Phosphorus Fabrication of SU-8 Microneedle Based on Backside Exposure Technology Analysis on the Effect of Machining Error on the Vibration of MEMS Device A Variable Resistor Micro System Based on Electro-Explosion Design and Experimental Study of a Composite Materials Micro-Deformation Measurement Device A Low-Frequency Filter in Inertial Applications Experimental Investigations on New Characterization Method for Giant Piezoresistance Effect and Silicon Nanowire Piezoresistive Detection Application of Magnetic Filter Technology in Improving the Precision of a Micro Attitude Reference System Intelligent Logistics Monitoring Microsystem Based on STM32 Nondestructive Microscopy Test on Damage of Waterproof Material in Underground Engineering A Robust Adaptive Angle Algorithm for Imaging Bionic Polarization Navigation Sensor A Nano-Cantilever Bending Method for Interface Cracking in Nanoscale Materials The Displacement Characteristics of Piezoelectric Ceramic Micro Actuators Evaluated by Laser Interferometer On the Temperature-Related Mechanical Properties of UV-LIGA Nickel Material Design and Experiment Research on MEMS Vector Hydrophone Vibration Damping Structure The Test and Simulation Modeling of Micro Scale Solid Particles Fuel Cloud Dispersal under High Dynamic Chapter 4: Micro Actuators and Devices Performance-Enhanced Heat Converter Used in FPA Utilizing a SiOx/Al Corrugated Micro-Cantilever Actuator Modeling of Hysteresis in Piezoelectric Actuator Using Linear Play Operator Adaptive Filter The Dynamic Characteristics Research of MEMS V-Shaped SiO2/Al Electrothermal Actuator The Parametric Analysis of the Threshold Value Judging Mechanism in MEMS Safety and Arming Device The Error Analysis of Micro-Flow Self-Sensing Actuator Analysis of Harmonic Distortion of Sigma-Delta Modulator The Parametric Analysis of the Lock-Releasing Mechanism in MEMS Safety and Arming Device Theoretical Investigation of the Electronic Properties in BN Nanowires Dynamic Modeling and Output Characteristic Analysis of a Micro Bistable Piezoelectric Generator Impact of Cross-Section and Size on Vibration of Silicon Nanowires Controlled Encapsulation of Micron-Sized Beads in a Droplet Based on Pulse Inertia Force Driving of Micro-Fluids Interference Fit Assembly of Micro-Parts Based on Microscopic Vision and Force Scalable Electrical Model and Performance Analysis of a Novel Bar TSV Structure Experimental Investigation of Thermal Conduction Performance on Silicon-Based Micro Flat Heat Pipe Analysis of Effective Field Emitting Angle for Spindt Cathode Fabrication of Convex Plate-Shaped Micro Tool Electrode and its Application in Micro Hole Machining by ECM Design of Micromachining System Based on Nanosecond Pulsed Laser Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser Constructing Dual Band Metamaterial Absorbers at Mid-Infrared by Employing Multi-Resonant Structures Structure Design of Large Travel One-Arm Bridge Type Z-Axis Nano-Positioning Stage Effect of Undercut on the Characterization of the Mechanical Properties of Silicon Nanocantilevers with Dynamic and Static Test Implementation of Convolutional Encoder in Quantum-Dot Cellular Automata Chapter 5: Optics in the Scale of Micro and Nano Theoretical and Experimental Studies on Microcavity Organic Light-Emitting Diodes with Different Emitters A Method to Fabricate Thin Micro Silicon Cantilever Based on Optical Lithography with AZ 1518 Design and Experiment of Phase Laser Ranging System Based on MEMS Mirror for Scanning Detection High-Frequency InP-InGaAsP Heterojunction Phototransistor Employing a UTC Structure A Compact Infrared Gas Sensor Based on an Asymmetry Gas Cavity Surface Micromachined Mirror Based on Pre-Stress Comb-Drive Actuator Design and Simulation of MEMS Mirror Based 3D Shape Measurement System Chapter 6: Energy Harvesting, Power Supply and Technologies for Fuel Cells The Design of an Interface Circuit for Micro-Electrostatic Vibration Energy Harvesters and Super-Capacitor Fabrication of Aluminum Nitride Films by Reactive Pulse DC Magnetron Sputtering for Vibration Energy Harvester Novel Wind Energy Harvesting Device for City Building Based on ZnO Films Array VCuxOy Thin Film by Magnetron Sputtering as Cathode Material for Thin Film Lithium-Ion Microbatteries High Performance Supercapacitor Electrode Materials Based on Activated Carbon and Conducting Polypyrrole Electrohydrodynamic Atomization Deposition of Fuel Cell Catalyst-Coated Membrane with Structure and Material Gradient Variation Secondary Synthesis of Microporous Heteroatoms Y Zeolite and their Hydrodesulfurization Properties for Model Fuel A 3D All-Solid-State Thin Film Microbattery with Inverted Pyramid Arrays Formation of Membrane Electrode Assembly for High Temperature Methanol Fuel Cells Asymmetric Design of Anode and Cathode Current Collectors for Micro Direct Methanol Fuel Cells Study on the Energy Harvesting Performance of PE Cantilever Beam To Improve Micro-Planar-Magnetic Generator Performance Based on Addition of Magnetic Material Electrospun PVDF/PMMA/SiO2 Membrane Separators for Rechargeable Lithium-Ion Batteries Electrospun SnO2-Graphene Composite Nanofibers as High Performance Anode for Lithium Ion Batteries Numerical Optimization Approach of the Gap between the Magnet and Coil for Electromagnetic Vibration Energy Harvesters Design Design and Comparison of Micro Electromagnetic Vibration Energy Harvesters Corrosion Behavior of SAMs Modified Silver-Coated 316LSS as PEMFC Bipolar Plates Chapter 7: Bioresearch and Biomedical Engineering Stabilization of Pickering Emulsions by Bacterial Cellulose Nanofibrils Enrichment Efficiency Optimization of Dielectrophoresis Cell Chip Based on Interdigitated Microelectrodes Array Functionalization of Mesoporous SBA-15 with APTES by Co-Condensation and its Effect on Immobilization of Candidarugosa Lipase Fabrication of a Pendulous Resonant Micro-Machined Biosensor for Direct Liquid Detection In Situ Synthesis of the Hollow Silica Microspheres with Porous Surface by Using Chemical Modified Pollen Grains as Biotemplate CMOS Amplifier for Neural Signal Recording Applications Analysis and Simulation of a Planar Microelectrode Structure for Dielectrophoretic Manipulation of a Single Cell and Cell Cluster A Biological 3D Printer for the Preparation of Tissue Engineering Micro-Channel Scaffold Specific Detection of Staphylococcus Enterotoxin B in Milk Using Piezoresistive Cantilever Aptasensor Biological CAD/CAM/3D Printing Integrated Molding Platform and System Building A CMOS Automatic Gain Control Circuit for Biomedical Applications Facile Preparation of Cu/TiO2 Nanocomposite via Photocatalysis and their Antibacterial Performance Design of a Microfluidic Chip for Enrichment of Circulating Tumor Cells Biological Effect of Single Wall Carbon Nanotubes on Skeletonemacostatum and Prorocentrum donghaiense in Seawaters Expansion Performance of Novel Balloon-Expandable Stent for Tapered Vessel Synthesis of Silica Modified Large-Sized Hydroxyapatite Whiskers by a Hydrothermal Co-Precipitation Method Flow Field Analysis for Plant Vessel and Bionic Structural Microfluidic Chip The Application of Micro-Flow Extrusion Forming Technology in the Denture Preparation Yeast Cells Immobilization in Microfluidic Channels Based on a Self-Polymerized Nano-Film of Poly(Dopamine) An Ultrasonic Micro Knife Based on Triangular Silicon Horn Chip Preparation and Characterization of Tissue Engineering Scaffolds by Composite Molding of 3D Printing and Electrospinning Pretreatment with Huperzine A-Loaded Poly(lactide-co-glycolide) Nanoparticles Protects against Lethal Effects of Soman-Induced in Mice