Processes in Devices Fabrication
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Processes in Devices Fabrication

Processes in Devices Fabrication


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About the Book

By combining perspective materials processing techniques, device engineering, and circuit integration methods, this special edition provides a comprehensive overview of the state of the art in SiC-based power electronics device fabrication technologies, serving as a valuable resource for researchers, engineers, and practitioners in the field.

Table of Contents:
Preface Isolation Structure for Monolithic Integration of Planar CMOS and 1.7 kV Vertical Power MOSFET on 4H-SiC by High Energy Ion Implantation Impact of Silicon Nitride Stress on Defects Generation in 4H-SiC and the Effect of Sacrificial Oxidation on Defects Reduction Impact of Interfacial SiO2 Layer Thickness on the Electrical Performance of SiO2/High-K Stacks on 4H-SiC Evolution of the Electrical and Microstructural Properties of Mo/4H-SiC Contact with the Annealing Temperature Rapid Thermal Anneal with Conductive Heating for SiC Contact Formation The Investigation of Effective Thermal Oxidation to SiC MOSFET Gate Oxide Quality Improvement A Simplified Method for Extracting Contact Resistivity Using the Circular Transmission Line Model BCl3 Plasma Treatment for Enhanced Ohmic Contact Performance to p-Type 4H-SiC Advantages of Backside Metal Contact Resistance on 4H-SiC Bonded Substrates for Power Devices Investigation of Interface and Reliability of 3C- and 4H-SiC MOS Structures through Gate Dielectric Stacking and Post-Deposition Annealing Deep Implanted SiC Super-Junction Technology Improved Angle Tolerance in 4H-SiC Trench Filling Epitaxy Using Chlorinated Chemistry Study of SiC Trench Etching Characteristics for Different Crystal Planes


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Product Details
  • ISBN-13: 9783036409115
  • Publisher: Trans Tech Publications Ltd
  • Publisher Imprint: Trans Tech Publications Ltd
  • Height: 240 mm
  • No of Pages: 104
  • Weight: 320 gr
  • ISBN-10: 3036409114
  • Publisher Date: 25 Sep 2025
  • Binding: Paperback
  • Language: English
  • Spine Width: 5 mm
  • Width: 170 mm


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