Microsystems Technology by Jumana Boussey at Bookstore UAE
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Home > Science, Technology & Agriculture > Mechanical engineering and materials > Mechanical engineering > Microsystems Technology: Fabrication, Test and Reliability
Microsystems Technology: Fabrication, Test and Reliability

Microsystems Technology: Fabrication, Test and Reliability


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About the Book

Microsystems technology encompasses microfabrication techniques and uses a range of expertise from specific design to customized packing and a large range of collective fabrication procedures. This work covers the subject from various aspects, including surface and bulk micromachining, sensors, LIGA microfabrication techniques, electrostatically actuated microactuators and wafer bonding methods. This is followed by a series of case studies dealing with major applications such as RF-MEMS, MOEMS and magnetic microsystems. Finally, the contributions focus on packaging, testing, reliability and failure analysis techniques and CAO tools and methods.

Table of Contents:
1. From Microelectronics to Microtechnologies 2. Surface Micro-Machining: An Overview 3. Bulk Micro-Machining and MEMS Packaging 4. Electrostatic Micro-Actuators 5. The LIGA Microfabrication Technique 6. A Review of Wafer Bonding 7. Single-Crystal Silicon Micro-Opto-Electro-Mechanical Devices 8. Permanent Magnets for MAGMAS 9. RF MEMS for Mobile Communications Era: Present and Future 10. From Microelectronics to Integrated Microsystems Testing 11. Reliability and Failure Analysis Issues in MEMS 12. CoventorWare[trademark] MEMS Design Methodology

About the Author :
Jumana Boussey is a lecturer at the 'Ecole Nationale Superieure d'Electronique et de Radioelectricite de Grenoble' (ENSERG), which is one of the nine engineering schools that form the Institut Polytechnique de Grenoble (INPG) in France.


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Product Details
  • ISBN-13: 9781903996478
  • Publisher: Kogan Page Ltd
  • Publisher Imprint: Kogan Page Science
  • Height: 234 mm
  • Returnable: N
  • Weight: 597 gr
  • ISBN-10: 1903996473
  • Publisher Date: 24 Sep 2003
  • Binding: Hardback
  • Language: English
  • Sub Title: Fabrication, Test and Reliability
  • Width: 156 mm


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