Efficient Evaluation of Damping in Resonant Mems. - Bookswagon
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Efficient Evaluation of Damping in Resonant Mems.

Efficient Evaluation of Damping in Resonant Mems.


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About the Book

This dissertation is about numerical methods for efficiently simulating damping behavior in Microelectromechanical Systems (MEMS). Within the class of MEMS devices, focus is put on the simulation of high-frequency mechanical resonators which have potential applications as on-chip, high-performance, low-power signal-processing elements such as filters or oscillators in radio-frequency (RF) wireless technology. The performance of these devices are defined by the quality factor Q, which is defined as the maximum stored energy divided by the energy dissipation per radian of oscillation. High Q values are desired, but can be limited by energy dissipation mechanisms such as anchor loss, thermoelastic damping, air damping, material losses, and ohmic loss. The design process of these MEMS resonators can be accelerated significantly by accurate and efficient numerical simulations which can predict the amount of damping in the system, and ultimately Q. In this work, numerical methods to efficiently evaluate Q for systems with anchor loss and thermoelastic damping are developed. Anchor loss contributions to Q are computed from the solution of a complex-symmetric eigenvalue problem through a Jacobi-Davidson QZ eigensolver in combination with a scalable (to millions of unknowns) geometric multigrid we have developed specifically for this type of problem. Thermoelastic contributions to Q are simulated by efficient evaluation of transfer functions by a second-order Krylov subspace based structure preserving reduced order model. The MEMS resonators introduced here are components of an electrical circuit and actuated electrostatically or piezoelectrically, making them electromechanically coupled systems. Efficient transfer function evaluation through the extraction of equivalent circuit parameters based on a variational framework extendable to various resonator geometries is also presented. The numerical simulations of a class of disk resonators reveal contradictory results to experimental claims regarding decreases in Q with respect to post misalignment. The simulations only incorporate purely mechanical effects and ideal geometry, which implies that sources such as electromechanical coupling effects and geometrical variations are responsible for this Q sensitivity.


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Product Details
  • ISBN-13: 9781243536914
  • Publisher: Proquest, Umi Dissertation Publishing
  • Publisher Imprint: Proquest, Umi Dissertation Publishing
  • Height: 246 mm
  • Weight: 540 gr
  • ISBN-10: 1243536918
  • Publisher Date: 01 Sep 2011
  • Binding: Paperback
  • Spine Width: 16 mm
  • Width: 189 mm


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Efficient Evaluation of Damping in Resonant Mems.
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