Green Etching Techniques for MEMS Applications - Bookswagon
Book 1
Book 2
Book 3
Book 1
Book 2
Book 3
Book 1
Book 2
Book 3
Book 1
Book 2
Book 3
Home > Science, Technology & Agriculture > Industrial chemistry and manufacturing technologies > Industrial chemistry and chemical engineering > Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems


     0     
5
4
3
2
1



Out of Stock


Notify me when this book is in stock
X
About the Book

Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS). With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication. Features: Thorough analysis of fluorine-free, environmentally friendly MEMS etching alternatives Coverage of emerging technologies, including supercritical CO₂, ionic liquids, and gas-phase selective etching Exploration of AI-driven process optimization for sustainable and efficient MEMS manufacturing Detailed industrial case studies highlighting successful implementation and scalability Clear discussions on regulatory drivers, market trends, and future roadmaps for sustainable microfabrication

Table of Contents:
Chapter 1: Introduction to Green Etching in MEMS Manufacturing Chapter 2: Theoretical Foundations and Mechanisms of Etching Chapter 3: Fluorine-Free Dry Etching for MEMS Chapter 4: Advanced Dry Etching Technologies for MEMS Chapter 5: Wet Etching Alternatives for Green MEMS Processing Chapter 6: Electrochemical Etching for Green MEMS Fabrication Chapter 7: Energy-Efficient Plasma Etching Techniques for MEMS Chapter 8: Industrial Adoption and Future Roadmap for Green MEMS Etching

About the Author :
Kaiying Wang received his PhD in condensed matter physics from the Institute of Physics, Chinese Academy of Sciences. He joined the University of South-Eastern Norway (USN) in 2007 as an associate professor and was promoted to professor in 2010. His research interests focus on micro-fabrication and nanotechnology, electrochemistry, photochemistry and nanodevices for environment and energy applications. For teaching, he has taught the Microfabrication (MFA4000, master) and Nanotechnology (TSE3120, bachelor) at the University of South-Eastern Norway since 2010. Meanwhile, he has participated in several national and European projects related to micro/nano fabrication technology. The related education programmes at USN include: (1) Sensor Systems and Innovation (2) Smart Systems Integrated Solutions, and (3) Micro- and Nano Systems Technology.


Best Sellers


Product Details
  • ISBN-13: 9781040767054
  • Publisher: Taylor & Francis Ltd
  • Binding: Digital (delivered electronically)
  • Sub Title: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
  • ISBN-10: 1040767052
  • Publisher Date: 19 Dec 2025
  • Language: English


Similar Products

Add Photo
Add Photo

Customer Reviews

REVIEWS      0     
Click Here To Be The First to Review this Product
Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
Taylor & Francis Ltd -
Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
Writing guidlines
We want to publish your review, so please:
  • keep your review on the product. Review's that defame author's character will be rejected.
  • Keep your review focused on the product.
  • Avoid writing about customer service. contact us instead if you have issue requiring immediate attention.
  • Refrain from mentioning competitors or the specific price you paid for the product.
  • Do not include any personally identifiable information, such as full names.

Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

Required fields are marked with *

Review Title*
Review
    Add Photo Add up to 6 photos
    Would you recommend this product to a friend?
    Tag this Book Read more
    Does your review contain spoilers?
    What type of reader best describes you?
    I agree to the terms & conditions
    You may receive emails regarding this submission. Any emails will include the ability to opt-out of future communications.

    CUSTOMER RATINGS AND REVIEWS AND QUESTIONS AND ANSWERS TERMS OF USE

    These Terms of Use govern your conduct associated with the Customer Ratings and Reviews and/or Questions and Answers service offered by Bookswagon (the "CRR Service").


    By submitting any content to Bookswagon, you guarantee that:
    • You are the sole author and owner of the intellectual property rights in the content;
    • All "moral rights" that you may have in such content have been voluntarily waived by you;
    • All content that you post is accurate;
    • You are at least 13 years old;
    • Use of the content you supply does not violate these Terms of Use and will not cause injury to any person or entity.
    You further agree that you may not submit any content:
    • That is known by you to be false, inaccurate or misleading;
    • That infringes any third party's copyright, patent, trademark, trade secret or other proprietary rights or rights of publicity or privacy;
    • That violates any law, statute, ordinance or regulation (including, but not limited to, those governing, consumer protection, unfair competition, anti-discrimination or false advertising);
    • That is, or may reasonably be considered to be, defamatory, libelous, hateful, racially or religiously biased or offensive, unlawfully threatening or unlawfully harassing to any individual, partnership or corporation;
    • For which you were compensated or granted any consideration by any unapproved third party;
    • That includes any information that references other websites, addresses, email addresses, contact information or phone numbers;
    • That contains any computer viruses, worms or other potentially damaging computer programs or files.
    You agree to indemnify and hold Bookswagon (and its officers, directors, agents, subsidiaries, joint ventures, employees and third-party service providers, including but not limited to Bazaarvoice, Inc.), harmless from all claims, demands, and damages (actual and consequential) of every kind and nature, known and unknown including reasonable attorneys' fees, arising out of a breach of your representations and warranties set forth above, or your violation of any law or the rights of a third party.


    For any content that you submit, you grant Bookswagon a perpetual, irrevocable, royalty-free, transferable right and license to use, copy, modify, delete in its entirety, adapt, publish, translate, create derivative works from and/or sell, transfer, and/or distribute such content and/or incorporate such content into any form, medium or technology throughout the world without compensation to you. Additionally,  Bookswagon may transfer or share any personal information that you submit with its third-party service providers, including but not limited to Bazaarvoice, Inc. in accordance with  Privacy Policy


    All content that you submit may be used at Bookswagon's sole discretion. Bookswagon reserves the right to change, condense, withhold publication, remove or delete any content on Bookswagon's website that Bookswagon deems, in its sole discretion, to violate the content guidelines or any other provision of these Terms of Use.  Bookswagon does not guarantee that you will have any recourse through Bookswagon to edit or delete any content you have submitted. Ratings and written comments are generally posted within two to four business days. However, Bookswagon reserves the right to remove or to refuse to post any submission to the extent authorized by law. You acknowledge that you, not Bookswagon, are responsible for the contents of your submission. None of the content that you submit shall be subject to any obligation of confidence on the part of Bookswagon, its agents, subsidiaries, affiliates, partners or third party service providers (including but not limited to Bazaarvoice, Inc.)and their respective directors, officers and employees.

    Accept

    Fresh on the Shelf


    Inspired by your browsing history


    Your review has been submitted!

    You've already reviewed this product!