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Home > Mathematics and Science Textbooks > Chemistry > Integrated Circuits: Chemical and Physical Processing(290 ACS Symposium Series)
Integrated Circuits: Chemical and Physical Processing(290 ACS Symposium Series)

Integrated Circuits: Chemical and Physical Processing(290 ACS Symposium Series)


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About the Book

Explores the complex physical and chemical operations that are designed to build structures or modify properties of materials in very thin films. Covers fundamental phenomena occurring in unit processes used to manufacture integrated circuits. Examines the most significant fundamental manufacturing processes.

Table of Contents:
The Manufacture of Integrated Circuits; Application of Three Fundamental Conservation Laws; Silicon Oxidation; Zone Refining of Low Prandtl Number Liquid Metals; Research Opportunities in Resist Technology; Modifications of Photoresists; Developer Concentration Effects; Molecular-Beam Epitaxy for Device Applications; Ion-Implanted Integrated Circuits; Plasma-Assisted Processing; Oxides and Nitrides of Germanium; Group III-IV Compound Optoelectronic Devices; Advanced Device Isolation for VLSI; Ternary Group III-V Semiconductor Materials; Device-Quality Strained-Layer Superlattices Wafer Design and Characterization


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Product Details
  • ISBN-13: 9780841209404
  • Publisher: American Chemical Society
  • Publisher Imprint: American Chemical Society
  • Language: English
  • Series Title: 290 ACS Symposium Series
  • Weight: 599 gr
  • ISBN-10: 0841209405
  • Publisher Date: 01 Oct 1985
  • Binding: Hardback
  • Returnable: N
  • Sub Title: Chemical and Physical Processing


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