Photoreactive Polymers
Home > Science, Technology & Agriculture > Mechanical engineering and materials > Materials science > Photoreactive Polymers: The Science and Technology of Resists
Photoreactive Polymers: The Science and Technology of Resists

Photoreactive Polymers: The Science and Technology of Resists


     0     
5
4
3
2
1



Out of Stock


Notify me when this book is in stock
X
About the Book

Basic mechanisms and applications of photoresist chemistry in semiconductor device manufacturing, lithography, chemical engineering, and the graphic arts are discussed in this book. It gives a balanced view of the subject as it now stands and at the same time promotes an understanding of the perennial challenge of material science to meet the demands of new technology by the successful design of new materials. The presentation of the text follows the history of the subject, and the generic resist systems are described approximately in the order in which they made their appearance. This approach maintains the logic of technical development where a new material emerges in response to some deficiency in its historic precursor. The chapters dealing with the resists are interspersed with sections on the related background in photophysics, radiation chemistry, and image science. The text will be of benefit to engineers, chemists and materials scientists in the semiconductor, graphic arts, and polymer photography industries, and graduate students in chemical engineering and electronics.

Table of Contents:
A brief history of resists; negative photoresists; aspects of photophysics and photochemistry in solid polymers; photoinitiated polymerization; positive resists based on diazonaphthoquinones; the rudiments of imaging science; deep-UV lithography; electron beam lithography; X-ray and ion beam lithographies; multilayer techniques and plasma processing.


Best Sellers


Product Details
  • ISBN-13: 9780471855507
  • Publisher: John Wiley and Sons Ltd
  • Publisher Imprint: John Wiley & Sons Inc
  • Height: 65 mm
  • Returnable: N
  • Weight: 737 gr
  • ISBN-10: 0471855502
  • Publisher Date: 01 Feb 1989
  • Binding: Hardback
  • Language: English
  • Sub Title: The Science and Technology of Resists
  • Width: 40 mm


Similar Products

Add Photo
Add Photo

Customer Reviews

REVIEWS      0     
Click Here To Be The First to Review this Product
Photoreactive Polymers: The Science and Technology of Resists
John Wiley and Sons Ltd -
Photoreactive Polymers: The Science and Technology of Resists
Writing guidlines
We want to publish your review, so please:
  • keep your review on the product. Review's that defame author's character will be rejected.
  • Keep your review focused on the product.
  • Avoid writing about customer service. contact us instead if you have issue requiring immediate attention.
  • Refrain from mentioning competitors or the specific price you paid for the product.
  • Do not include any personally identifiable information, such as full names.

Photoreactive Polymers: The Science and Technology of Resists

Required fields are marked with *

Review Title*
Review
    Add Photo Add up to 6 photos
    Would you recommend this product to a friend?
    Tag this Book Read more
    Does your review contain spoilers?
    What type of reader best describes you?
    I agree to the terms & conditions
    You may receive emails regarding this submission. Any emails will include the ability to opt-out of future communications.

    CUSTOMER RATINGS AND REVIEWS AND QUESTIONS AND ANSWERS TERMS OF USE

    These Terms of Use govern your conduct associated with the Customer Ratings and Reviews and/or Questions and Answers service offered by Bookswagon (the "CRR Service").


    By submitting any content to Bookswagon, you guarantee that:
    • You are the sole author and owner of the intellectual property rights in the content;
    • All "moral rights" that you may have in such content have been voluntarily waived by you;
    • All content that you post is accurate;
    • You are at least 13 years old;
    • Use of the content you supply does not violate these Terms of Use and will not cause injury to any person or entity.
    You further agree that you may not submit any content:
    • That is known by you to be false, inaccurate or misleading;
    • That infringes any third party's copyright, patent, trademark, trade secret or other proprietary rights or rights of publicity or privacy;
    • That violates any law, statute, ordinance or regulation (including, but not limited to, those governing, consumer protection, unfair competition, anti-discrimination or false advertising);
    • That is, or may reasonably be considered to be, defamatory, libelous, hateful, racially or religiously biased or offensive, unlawfully threatening or unlawfully harassing to any individual, partnership or corporation;
    • For which you were compensated or granted any consideration by any unapproved third party;
    • That includes any information that references other websites, addresses, email addresses, contact information or phone numbers;
    • That contains any computer viruses, worms or other potentially damaging computer programs or files.
    You agree to indemnify and hold Bookswagon (and its officers, directors, agents, subsidiaries, joint ventures, employees and third-party service providers, including but not limited to Bazaarvoice, Inc.), harmless from all claims, demands, and damages (actual and consequential) of every kind and nature, known and unknown including reasonable attorneys' fees, arising out of a breach of your representations and warranties set forth above, or your violation of any law or the rights of a third party.


    For any content that you submit, you grant Bookswagon a perpetual, irrevocable, royalty-free, transferable right and license to use, copy, modify, delete in its entirety, adapt, publish, translate, create derivative works from and/or sell, transfer, and/or distribute such content and/or incorporate such content into any form, medium or technology throughout the world without compensation to you. Additionally,  Bookswagon may transfer or share any personal information that you submit with its third-party service providers, including but not limited to Bazaarvoice, Inc. in accordance with  Privacy Policy


    All content that you submit may be used at Bookswagon's sole discretion. Bookswagon reserves the right to change, condense, withhold publication, remove or delete any content on Bookswagon's website that Bookswagon deems, in its sole discretion, to violate the content guidelines or any other provision of these Terms of Use.  Bookswagon does not guarantee that you will have any recourse through Bookswagon to edit or delete any content you have submitted. Ratings and written comments are generally posted within two to four business days. However, Bookswagon reserves the right to remove or to refuse to post any submission to the extent authorized by law. You acknowledge that you, not Bookswagon, are responsible for the contents of your submission. None of the content that you submit shall be subject to any obligation of confidence on the part of Bookswagon, its agents, subsidiaries, affiliates, partners or third party service providers (including but not limited to Bazaarvoice, Inc.)and their respective directors, officers and employees.

    Accept

    New Arrivals


    Inspired by your browsing history


    Your review has been submitted!

    You've already reviewed this product!