Amorphous Insulating Thin Films II
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Amorphous Insulating Thin Films II: Proceedings of Symposium A of the 1994 E-MRS Spring Conference, Strasbourg, France, 24-27 May 1994(v. 46 European Materials Research Aociety Symposia Proceedings S.)

Amorphous Insulating Thin Films II: Proceedings of Symposium A of the 1994 E-MRS Spring Conference, Strasbourg, France, 24-27 May 1994(v. 46 European Materials Research Aociety Symposia Proceedings S.)


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About the Book

These proceedings present an up-to-date review of the research being carried out in the field of amorphous insulating thin films. The papers are presented by scientists representing 20 different countries.

Table of Contents:
General - dielectrics in microelectronics - problems and perspectives, P. Balk; silicon dioxide, oxidation and unusual structures, burried oxides - where we're going, J.-L. Leray; silicon dioxide, deposition, fluorinated interlayer dielectric films in ULSI multilayer interconnections, T. Homma; silicon dioxide, structure, defects and characterization; silicon dioxide, defects and degradation; silicon dioxide, charge trapping; Si/SiO2 interface, characterization and electrical properties, enhanced 1/f noise due to near interfacial oxygen deficiency, D.M. Fleetwood et al; hydrogen in MOS structures and oxides, theoretical results on hydrogen in MOS systems, A.H. Edwards, chemical reactions of hydrogenous species in Si/SiO2 systems, E.H. Poindexter; nitrides, structure and defects, structural and bonding properties of amorphous silicon nitride films, S. Hasegaw et al; silicon nitride, deposition; ONO and nitrided oxides; silicon oxynitride and other dielectrics, structural identification of point defects in amorphous silicon oxynitrides, Y. Cros; high E materials and ferroelectrics; optical applications, chemical interaction in ion-implanted amorphous SiO2 and application to formation and modification of nanosize colloids, H. Hosono. (Part contents)


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Product Details
  • ISBN-13: 9780444821614
  • Publisher: Elsevier Science & Technology
  • Publisher Imprint: Elsevier Science Ltd
  • Height: 230 mm
  • Series Title: v. 46 European Materials Research Aociety Symposia Proceedings S.
  • ISBN-10: 0444821619
  • Publisher Date: /08/1995
  • Binding: Hardback
  • Language: English
  • Sub Title: Proceedings of Symposium A of the 1994 E-MRS Spring Conference, Strasbourg, France, 24-27 May 1994


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Amorphous Insulating Thin Films II: Proceedings of Symposium A of the 1994 E-MRS Spring Conference, Strasbourg, France, 24-27 May 1994(v. 46 European Materials Research Aociety Symposia Proceedings S.)
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Amorphous Insulating Thin Films II: Proceedings of Symposium A of the 1994 E-MRS Spring Conference, Strasbourg, France, 24-27 May 1994(v. 46 European Materials Research Aociety Symposia Proceedings S.)
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Amorphous Insulating Thin Films II: Proceedings of Symposium A of the 1994 E-MRS Spring Conference, Strasbourg, France, 24-27 May 1994(v. 46 European Materials Research Aociety Symposia Proceedings S.)

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